ST3000
The SainTech ST3000 Ion System has been specially developed to provide an extremely reliable and maintenance-free facility for many applications in physical vapour deposition processes. The compact design and rugged construction allows easy installation to both new and existing vacuum deposition systems.
ST3000 Features:
- Ion Beam energies up to 300eV
- Ion Beam power to 3.0 kilowatts
- Ion Beam currents to 15 amps
- Full-time use of high purity oxygen
Optional Features Available –
- Dual Filament. Electronic system detects filament failure and auto switches to second filament. Refer System Specifications for detail
- Dual Gas. This feature provides use of either pure gas delivery or a mixture of two gases in any ratio. Refer System Specification for detail
- Mounting Hardware MH. Several options are available. The mounting brackets are clamped to a special gas feedthrough. Refer System Specification for detail
| Dimensions Source | diameter 115 mm diameter by 80 mm long (4.5” x 3.2”) Source weight – 4 kgs (approx. 9 lbs) |
| Beam power | Anode volts selectable to 300 volts; anode power 3000 W Beam current to maximum 12 amps under manual or automatic beam control |
| Beam divergence | Wide beam divergence in excess of 80 degrees |
| Gas flow | Approximately 12sccm gas flow required to produce 4 amps (typical) |
| Cooling water | minimum 4.0 liters/minute. Water flow is constantly monitored |
| Power Unit | weight approx. 35 kgs (72lbs) 175mm x 435mm x 520mm |
| Power Needs | 208 – 250 VAC single phase 50 or 60Hz 15 amps |
| MFC | supplied range 30 sccm |