|
|
|
|
|
|
Every Saintech ion source has been specially developed to provide an extremely reliable and maintenance-free facility. Our patented gas delivery system removes the need for a gas distributor, thereby reducing maintenence downtime and keeping consumable parts to a minimum.
The compact design and rugged construction of the ion source allows easy installation to both new and existing vacuum deposition systems.
The ion source range consists of four models designed for your specific needs. Click on the model for more information. Further information on the ion source options is available from our Options page
|
Ion source |
Output power |
Ion source recommended for : |
Options |
| ST3000 |
2.5 kW |
Large scale IAD, chamber size greater than 1000 mm, Substrate preparation. |
Base model DF - dual filament DG - dual gas |
| ST55 |
1.3 kW |
Medium scale IAD chamber size up to 1200 mm, Substrate preparation. |
Base model DF - dual filament DG - dual gas |
| ST X-IAD |
800 W |
Small scale IAD, chamber size up to 750 mm, Substrate preparation. |
Base model |
| ST-clean |
600W |
Pre-deposition substrate cleaning only |
Base model |
The ST3000 and ST55 ion sources come standard with Saintech's patented PULSED mode operation. To learn about the benefits of Pulsed IAD, see our Application Notes page.
Chamber sizes are indiciations only. The correct Saintech ion source for your needs will depend on vacuum conditions, working distances and the deposition materials. Our qualified staff will gladly assist you in making your selection.
Saintech provides a range of mounting hardware. Please see our Accessories page for details.
|
|
|
|
|
|
|
|
|
|
|
|
|